Analytical Systems for semiconductor-photovoltaic applications

CQC for the semiconductor industry to monitor impurities in bulk gases from the gas farm all the way to post gas purifiers. Analyte include  moisture, oxygen, Hhydrogen, Carbon monoxide, carbon dioxide, methane and non methane hydrocarbos and particles at ppm, ppb and ppt levels according to the customers specs. The analytical rack is made of painted carbon steel with front door with a look-through window.ìThe cabinet is suitable to accommodate the specified analyzers, and all necessary mechanical and electrical equipment.

All tubing, fittings and valves are suitable for UHP semiconductor applications such as SS AISI EP 316 L < 10 μm. Valves are pneumatic and manual valves, ¼ turn opening with AIS 316 L body, diaphragm in Elgiloy, O-Ring in Viton, CV > 0.2, seat in PCTFE which is not in contact with the sample.

The assembling and welding of tubing and valves are according to SEMI Standard F-20.

All welds are made with orbital welding machine (TIG ARC MACHINES).

The welding flush and inert gases are purified and filtered at 0.003 micron and certified to impurity level not higher than 1 ppb.

All valves and pipework will be labelled with flow direction and type of gas.All pipework, connections, valves, instruments and filters will be supplied with material certificate

according to EN10204-3.1 (where applicable).